ALIX V5 QUANTUM

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Tempress Furnace Automation

ALIX V5 QUANTUM

Key system features

  • > 4,000 wfr/hr (load reload)
  • Solid sheet metal frame
  • Single wafer and back to back loading
  • Standard pitch and half pitch loading
  • Wafer thickness from 160 to 220 microns
  • Configurable to various carrier types
  • 4 cassettes buffer capacity

 

Customer benefits

  • High stability, reliability & accuracy
  • Excellent breakage rate, less than 0.06%
  • Low maintenance cost
  • Small footprint
  • Fast installation and easy operation
  • Lowest cost of ownership
  • Available as stand alone or integrated to Tempress diffusion furnaces

Safety Features include:

  • Safety light curtain for operator
  • Safety door sensor
  • Electrical safety module from B&R
  • Historical data recording
  • Comply to CE safety standards
  • 2 Emergency stop buttons
  • 1 Motion stop button
  • Stand By/Resume button

Standard Features ready to operate includes:

  • Cassette sensors
  • Wafer detection in cassette
  • Current limiters on all motors
  • Electric safety device (current cut)
  • Power “off “ security
  • Automatic home position
  • 17” color LCD Touchscreen
  • TCP/IP Host connection
  • Clean concept documentation
  • Light tower

System Characteristics

  • Size (L x W x H) :   Length 2,00m x Width 2,24m x Height 1,96m
  • Loading type :  Standard (4,76mm) or half pitch (2,38mm) Single slot or back to back
  • Wafer size :  156mm
  • Wafer thickness :  160 to 220 μm
  • Uptime : > 99%
  • Throughput : > 4,000 wafers/hr (load/ reload)
  • Breakage rate : < 0.07% (Cassette and boat tolerance must be within spec)

Maintenance

  • MTBF   > 1500 hrs
  • MTBA   > 750 hrs
  • MTTR   < 1hr

ALIX V5



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