Comet 2 station pitch changing

Comet 2 station pitch changingTransfer 25 TO 25 6″ to 8″

The Comet 2 station Pitch Changing system is a friendly, clean, reliable and robust Mass Wafer Transfer system, customized for your different boats and carriers.
The Comet 2 station Pitch Changing allows for the transfer of 25 wafers from 6″ cassette (4.76mm pitch) to 8″ cassette (6.35mm pitch).
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.
Fully automatic
Free hand operating

Options

  • Flat or notch aligner
  • SECSII-GEM communication
  • ESD combs

Performance

  • Cycle time: < 1 mn
  • Uptime: 99.8%
  • MTBF: > 4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Breakage rate: 1 for 5.105
  • Standard safety features
  • Peek material for pushers, retainers and boat adaptors
  • IR heat sensor
  • Double cassette sensors
  • Boat sensor
  • Wafer detection into cassette
  • Wafer detection into boat
  • Current limit on all motors
  • Power “off” security
  • Automatic home position
  • Carrier correctly positioned (mechanical)
  • Historical data recorded (error messages data time)

Facilities and Requirements:

  • Weight: 47 kg
  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management
  • RS 232 host connection


Tags:
COMPANY
About R2D Automation
PRODUCTS
Solar & Semiconductor systems
CUSTOMER SUPPORT
R2D Service solutions