Comet 2 station

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Transfer 25 TO 25 3″ to 8″

The Comet 2 station is the easy way to transfer 25 wafers from cassette to cassette or cassette to boat.
Comet 2 stationThis Comet is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
Easy to integrate in your process line and customizable (OEM customer)
One button system operation
LCD display indicating all cycle steps
Set up machine directly from the keyboard
Electronic Parts compatible for all Comet
Fully automatic
Free hand operating

Options

  • Flat or notch aligner
  • SECSII-GEM communication
  • ESD combs

Performance

  • Cycle time: < 1 mn
  • Uptime: 99.8%
  • MTBF: > 4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Breakage rate: 1 for 5.105
  • Standard safety features
  • Peek material for pushers, retainers and boat adaptors
  • IR heat sensor
  • Double cassette sensors
  • Boat sensor
  • Wafer detection into cassette
  • Wafer detection into boat
  • Current limit on all motors
  • Power “off” security
  • Automatic home position
  • Carrier correctly positioned (mechanical)
  • Historical data recorded (error messages data time)

Facilities and Requirements:

  • Weight: 42 kg
  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air

Specifications:

  • CE certification
  • SEMI Standard

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management
  • RS 232 host connection


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