Comet 4 station wet

Transfer 25/25 to 50, 13/12 to 25, 8″

Comet 4 station wet

Comet 4 station wet system is a friendly, clean, reliable and robust Mass Wafer Transfer system.
Customized for your different boats and carriers.
Fully automatic, Comet 4 Station can be integrated inside a WET bench.
Comet 4 station allows transfer 2×25 wafers from transport cassettes to a 50 position process boat.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set -up machine directly from the keyboard.
Electronic Parts compatible for all Comet.
Can be integrated with Robot arm and elevator systems.

Options

  • Flat or notch aligner
  • SECSII-GEM communication
  • ESD combs

Performance

  • Cycle time: < 1 mn
  • Uptime: 99.8%
  • MTBF: > 4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Breakage rate: 1 for 5.105
  • Standard safety features
  • Peek material for pushers, retainers and boat adaptors
  • IR heat sensor
  • Double cassette sensors
  • Boat sensor
  • Wafer detection into cassette
  • Wafer detection into boat
  • Current limit on all motors
  • Power “off” security
  • Automatic home position
  • Carrier correctly positioned (mechanical)
  • Historical data recorded (error messages data time)

Facilities and Requirements:

  • Weight: 52 kg
  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management
  • RS 232 host connection


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