1 to 200 wafers
150 or 200mm transfer
The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation.
The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling.
Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
On line scanning of the wafers allows the Robot to load and unload dummies wafers and prevent cross slotting.
This Comet unit is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set-up machine directly from the keyboard.
Electronic Parts compatible for all Comet.
Loader capacity from 6 to 12 cassettes
- Flat or notch aligner
- SECSII-GEM communication
- ESD combs
- Average loading/unloading time < 4mn for 150 wafers
- Optimized footprint
- Operator touch screen
- Easy for integration to any 150 or 200mm tool
- Interface RJ45 or RS 232/TCP/IP
- MTBF:> 3000 hrs
- MTBA: 750 hrs
- MTTR: < 1 hr
- Breakage rate:1 for 5.104
Facilities and Requirements:
- Weight: 150 kg
- Power: 100-240 VAC 75 watts
- Frequency: 50-60 Hz
- Full Load Amps: 1.2-0.6 A
- No need for compressed air
- CE certification
- SEMI Standard
- Class 1
- Standard or customizable software
- Restart after error
- Option multiple
- Friendly interface and customizable
- Easy integration with other systems by SECII-GEM, ASCII, RS, TCPIP