Comet Monostation

Comet MonostationTransfer 25 TO 25 3″ to 8″

Using Comet monostation is the easiest way to transfer 25 wafers from cassette to cassette or cassette to boat.
This Comet is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.

Options

  • Flat or notch aligner
  • SECSII-GEM communication
  • ESD combs

Performance

  • Cycle time: < 1 mn
  • Uptime: 99.8%
  • MTBF: >4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Breakage rate: 1 for 5.105
  • Standard safety features
  • Peek material for pushers, retainers and boat adaptors
  • IR heat sensor
  • Double cassette sensors
  • Boat sensor
  • Wafer detection into cassette
  • Wafer detection into boat
  • Current limit on all motors
  • Power “off” security
  • Automatic home position
  • Carrier correctly positioned (mechanical)
  • Historical data recorded (error messages data time)

Facilities and Requirements:

  • Weight: 33 kg
  • Power: 100-240 VAC
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management
  • RS 232 host connection


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