Gemini Cassette to Cassette transfer tool

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The Gemini is one of the smallest automatic wafer transfer systems available worldwide.  This semi-automatic transfer tool has a very small footprint and can load and unload 25 wafers from cassette to cassette in less than 30 seconds.

Once the pusher raises the wafers from the cassette and transfers them into the head assembly, the head assembly then moves to the rear of the tool away from the operator.  This allows for the operator to change to desired cassette with the wafers in in safe position.  When the green continue button is selected again the wafers are returned to the new cassette.

The Gemini is a simple to use and easy to maintain tool.

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Gemini wafer transfer tool

Gemini Batch Transfer Tool

  • Batch wafer transfer of 25 wafers from cassette to cassette
  • One of the world’s smallest batch transfer systems
  • Semi-Automatic
  • Transfers from Cassette to Cassette in 30 Seconds

Standard Features:

  • POM ESD pushers and retainers
  • Double cassette sensors
  • Ergonomic buttons (bigger and brighter)
  • Wafer detection in cassette
  • Wafer detection on head
  • Safety wafer detection if wafer down on head/Pusher
  • Current limiters on all motors
  • Electric safety device (current cut)
  • Power “off “security
  • Top pushers safety interlock
  • Open frame, designed for a vertical laminar flow
  • Automatic home position
  • Clean Room color paper and electronic PDF documentation

Facilities and Requirements:

  • Vacuum: No
  • Power: 100-240 VAC
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Performance:

  • MTBF: > 4000 hours
  • MTTR: < 1 hour
  • UPTIME: > 99 %


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