Gemini

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New Generation Gemini

 

GEMINI TRANSFER SYSTEM

The Gemini is the worldwide smaller wafer transfer system.
Semi automatic,this machine has the smaller footprint ever seen in a fab and can load and unload 25 wafers from cassette to cassette in less than 30 seconds
TGeminihe position of the wafers (in the rear of the machine) during the transfer secures the wafers , provides a good result from contamination tests and avoids operator error with the carrier
Integrated Infrared Heat Sensor Simple to use and easy to maintain
One button system operation
ESD combs standard

Gemini Batch Transfer Tool

  • Batch wafer transfer of 25 wafers from cassette to cassette
  • One of the world’s smallest batch transfer systems
  • Semi-Automatic
  • Transfers from Cassette to Cassette in 30 Seconds

Standard Features:

  • POM ESD pushers and retainers
  • Double cassette sensors
  • Ergonomic buttons (bigger and brighter)
  • Wafer detection in cassette
  • Wafer detection on head
  • Safety wafer detection if wafer down on head/Pusher
  • Current limiters on all motors
  • Electric safety device (current cut)
  • Power “off “security
  • Top pushers safety interlock
  • Open frame, designed for a vertical laminar flow
  • Automatic home position
  • Clean Room color paper and electronic PDF documentation

Facilities and Requirements:

  • Vacuum: No
  • Power: 100-240 VAC
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Performance:

  • MTBF: > 4000 hours
  • MTTR: < 1 hour
  • UPTIME: > 99 %


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