Vertical sorter (CVS) For SPIN DRYER Process

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Wafer Size 6” or 8” transfer
Batch transfer
Single transfer
Automatic dummies insertion

Vertical sorter (CVS) For SPIN DRYER Process

The CVS insures the transfer of a complete batch of wafers from a transport carrier into a process carrier.
Thanks to its wafer scanning, Comet CVS detects empty slots and adds dummies when necessary.
With the TAG reader, Comet CVS keeps in memory all carrier ID loaded and recognizes them to secure unloading.
Integrated Infrared Heat Sensor Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set-up machine directly from the keyboard.
Wafer Size 6″ or 8″ transfer
Batch transfer
Single transfer
Automatic dummies insertion

Options

  • Flat or notch aligner
  • SECSII-GEM communication
  • ESD combs

Performance

  • Cycle time: < 1 mn
  • Uptime: 99.8%
  • MTBF: > 4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Particle count: < 0.05@0.14 PWP
  • Breakage rate: 1 for 5.105
  • Standard safety features
  • Peek material for pushers, retainers and boat adapters
  • IR heat sensor
  • Double cassette sensors
  • Boat sensor
  • Wafer detection into cassette
  • Wafer detection into boat
  • Cross slotting detection (mapping)
  • Bar code reader for process boat identification
  • Current limit on all motors
  • Power “off” security
  • Automatic home position
  • Carrier correctly positioned (mechanical)
  • Historical data recorded (error messages, date, time)

Facilities and Requirements:

  • Weight: 60 kg
  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management
  • RS 232 host connection


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